The Monarch Error Data micrometers arcsec x(mm) dx(x) dy(x) dz(x) ex(x) ey(x) ez(x) 0 0.296001 1.73E-17 -2.8E-17 -0.00022 -3.3E-05 -0.00033 50 1.05676 0.702778 0.336222 0.743667 -0.18337 0.116333 100 1.284516 1.730556 1.637444 1.618111 -0.75003 -0.08367 150 0.762268 2.418333 2.558667 2.512 -1.13337 -0.167 200 -0.00298 3.121111 3.251556 3.219778 -1.40003 -0.65033 250 -0.35023 3.660556 4.409444 4.021444 -1.98337 -1.067 300 -1.73748 3.506667 4.770667 4.378111 -2.23337 -1.40033 350 -0.82372 3.011111 4.746889 4.408111 -2.33337 -1.817 400 -0.90997 2.553889 4.639778 4.395333 -2.30003 -2.13367 450 -0.58121 1.526667 3.939333 4.052556 -2.43337 -2.60033 500 -1.92046 0.622778 3.777222 3.813111 -2.73337 -2.88367 550 -0.5747 -0.37278 3.253444 3.100333 -2.9167 -3.20033 600 -1.82795 -1.01 2.766333 3.007 -2.8667 -3.33367 650 -0.70519 -1.07889 1.854222 2.417556 -2.5667 -3.317 700 -0.55844 -0.41111 0.973778 2.117 -2.35003 -3.317 750 -0.52468 -1.8E-14 5.55E-14 1.950333 -1.85003 -3.217 micrometers arcsec y(mm) dx(y) dy(y) dz(y) ex(y) ey(y) ez(y) 0 2.22E-16 5.33E-06 8.33E-17 0.000333 0.000222 0.000333 50 -0.67444 -0.01499 -0.26741 -0.083 0.149111 -0.573 100 -1.31556 3.483362 -0.90815 0.083667 0.259667 -1.03967 150 -2.37167 3.561696 -1.16056 0.267 0.468 -1.29967 200 -3.02944 4.315034 -0.85963 0.833667 0.643 -1.52633 250 -3.21056 4.938372 -0.19537 1.500333 0.828556 -1.72633 300 -3.175 4.685037 0.317222 2.183667 1.025778 -1.99967 350 -2.43278 2.885025 0.544815 2.667 1.122444 -2.37967 400 -1.62389 3.521696 0.362407 2.967 1.235222 -2.79967 450 6.66E-16 5.33E-06 3.47E-15 3.267 1.200778 -3.213 scale position micrometers arcsec z(mm) dx(z) dy(z) dz(z) ex(z) ey(z) ez(z) -230 -1.7E-16 0 -3.1E-08 -1.4E-17 5.92E-16 0 -180 2.215333 -1.52033 2.342345 0.9 1.416667 0 -130 2.629 1.426 4.829691 2.133333 2.866667 0 -80 1.424333 3.247333 2.868681 3.05 4.516667 0 -30 1.741333 6.483667 2.124344 4.433333 5.566667 0 20 4.64E-15 0 -3.1E-08 -0.48333 9.333333 0 straightness mirror is at 130 mm below quill quill bottom is 200 mm above table when zscale =-230 bottom of tool change clamp on tool holder is 20 mm below quill bottom bottom of nut on tool holder is about 80 mm below bottom of quill alpha_xy 6 arcsec toward +x direction alpha_yz 10 arcsec toward +y direction alpha_xz 10 arcsec toward -x direction